O-quinonediazide sulfonic acid esters of phenolic compounds and their use in forming positive images

摘要

A photosensitive compound comprising at least one o-quinonediazide sulfonic acid ester of a phenolic compound, said esters selected from the group consisting of formulae (IB) and (IIB): <IMAGE> (IB) <IMAGE> <IMAGE> (IIB) <IMAGE> wherein the photosensitive compound is used in a radiation sensitive composition and a process for forming a positive patterned image.