发明名称 PHOTOACTIVE COMPOUNDS
摘要 A photosensitizer comprising a trishydroxyphenylethane 80/20 to 50/50 2,1,5-/2,1,4-diazonaphthoquinone sulfonate, and a trishydroxybenzophenone 0/100 to 20/80 2,1,5-/2,1,4-diazonaphthoquinone sulfate, and a photoresist composition containing such photosensitizer, the photosensitizer being present in the photoresist composition in an amount sufficient to uniformly photosensitize the photoresist composition; and a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition.
申请公布号 WO9624886(A1) 申请公布日期 1996.08.15
申请号 WO1996US01837 申请日期 1996.02.09
申请人 HOECHST CELANESE CORPORATION 发明人 CANIZE, ANTHONY;FICNER, STANLEY, A.;LU, PING-HUNG;SPIESS, WALTER
分类号 G03F7/004;G03F7/022;(IPC1-7):G03F7/022 主分类号 G03F7/004
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