| 摘要 |
When a member for retaining a material to be treated is vertically moved, the pressures in a reaction tube and a transfer chamber are reduced to, for example, several to tens of Torr to cause a pneumatic pressure received by the material to decrease, whereby pressure variation is minimized. When the retainer member is vertically moved, a treatment gas is supplied in the same direction as the retainer member moves at a speed higher than the moving speed of the retainer member so that the material and the treatment gas do not move opposite to each other, whereby the resistance received by the material is reduced to minimize the pressure variation in the reaction tube.
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