发明名称 |
Method of making optical disk master and an optical disk |
摘要 |
An optical disk master having a diffraction structure including guide grooves and small pre-pits of a width narrower than a diffraction limit determined by a wavelength of light used is produced by preparing a photoresist layer subjected to anti-dissolution surface treatment, narrowing the spot diameter of a zero-th diffracted beam irradiated on the photoresist layer by a super resolution optics device, and effecting high contrast development to leave behind, as it is, a portion of the photoresist layer exposed to adverse higher order diffracted beams caused by super resolution. An optical disk produced from the master has a diffraction structure including tracks and/or pre-pits formed along a spiral track or concentric tracks and having a width narrower than a diffraction limit determined by a wavelength of light used in the course of formation of the diffraction structure.
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申请公布号 |
US5581531(A) |
申请公布日期 |
1996.12.03 |
申请号 |
US19940273627 |
申请日期 |
1994.07.12 |
申请人 |
HITACHI, LTD.;HITACHI MAXELL, LTD. |
发明人 |
ITO, MASARU;FUJITA, MASUMI |
分类号 |
G03F7/26;B41M5/26;G03F7/20;G11B7/004;G11B7/013;G11B7/125;G11B7/24;G11B7/26;(IPC1-7):G11B7/00 |
主分类号 |
G03F7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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