| 摘要 |
<p>Device for the treatment of substrates delivered in cassettes, the device having a sequence of lock chambers and treatment chambers and a transportation system for the transportation of at least one substrate holder through the chambers, and having a charging station. <??>To achieve the object of being able to load the device with substrates, with the belt running, without the substrates having to be held by positive-locking holders in all spatial coordinates, a) the substrate holders (30) are designed for holding in each case one substrate (5) at an acute angle with respect to a vertical plane and b) the charging station (25) has a moving device (34) for at least one cassette (26, 27) and a manipulator device (28), by means of which the lifting-out and insertion movement of the respective substrate (5) out of or into the cassette (26, 27) in the vertical direction can be carried out, and by means of which the substrate can be pivoted through 90 DEG into an oblique position essentially corresponding to the position of the retaining plane of the substrate holder (30). <IMAGE> </p> |
