Ion implantation method,申请号GB19960012437-传众专利搜索

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发明名称	Ion implantation method
摘要
申请公布号	GB9612437(D0)	申请公布日期	1996.08.14
申请号	GB19960012437	申请日期	1996.06.14
申请人	APPLIED MATERIALS INC	发明人
分类号	C23C14/48;H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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