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发明名称
PROCESS AND SYSTEM FOR PLASMA-ACTIVATED ELECTRON-BEAM VAPORISATION
摘要
申请公布号
EP0725843(A1)
申请公布日期
1996.08.14
申请号
EP19940929464
申请日期
1994.10.11
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
GOEDICKE, KLAUS;SCHEFFEL, BERT;RESCHKE, JONATHAN;SCHILLER, SIEGFRIED;KIRCHHOFF, VOLKER;WERNER, TORSTEN
分类号
C23C14/24;C23C14/30;C23C14/56;H01J37/305;(IPC1-7):C23C14/30;C23C14/32
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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