Waferhaltebefestigung für Belichtungsgerät,申请号DE19916018315T-传众专利搜索

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发明名称	Waferhaltebefestigung für Belichtungsgerät
摘要
申请公布号	DE69118315(T2)	申请公布日期	1996.08.14
申请号	DE19916018315T	申请日期	1991.11.01
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	HARA, SHINICHI, OHTA-KU, TOKYO, JP;SAKAMOTO, EIJI, OHTA-KU, TOKYO, JP;EBINUMA, RYUICHI, OHTA-KU, TOKYO, JP
分类号	G03F7/20;H01L21/00;H01L21/687;(IPC1-7):H01L21/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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