发明名称 |
METHOD FOR TREATING ARTICLES WITH A PLASMA JET |
摘要 |
A method for treating an article with a plasma jet is disclosed. The method involves rotating an article (30) with a surface (32) to be treated about an axis (Ha), wherein the rotation defines a rotation radius extending from the axis. The article surface is contacted with the plasma jet (10) to form a plasma jet footprint (11) having a predetermiend dimension on the article surface. The plasma jet footprint is moved along the rotation radius in the radial direction according to a velocity profile along the rotation radius so as to apply heat to the article surface to obtain a desired temperature distribution profile on the article surface along the rotation radius. The method provides a means for controlling the temperature of the article uniformly in a temperature range from about 30 DEG C and 1200 DEG C to allow different treatment applications to be performed on the article.
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申请公布号 |
WO9745856(A1) |
申请公布日期 |
1997.12.04 |
申请号 |
WO1997US09069 |
申请日期 |
1997.05.28 |
申请人 |
IPEC PRECISION, INC.;SINIAGUINE, OLEG;TOKMOULINE, ISKANDER |
发明人 |
SINIAGUINE, OLEG;TOKMOULINE, ISKANDER |
分类号 |
H01J37/32;C23C16/46;C23C16/50;C23C16/513;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32;H01L21/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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