发明名称 METHOD FOR TREATING ARTICLES WITH A PLASMA JET
摘要 A method for treating an article with a plasma jet is disclosed. The method involves rotating an article (30) with a surface (32) to be treated about an axis (Ha), wherein the rotation defines a rotation radius extending from the axis. The article surface is contacted with the plasma jet (10) to form a plasma jet footprint (11) having a predetermiend dimension on the article surface. The plasma jet footprint is moved along the rotation radius in the radial direction according to a velocity profile along the rotation radius so as to apply heat to the article surface to obtain a desired temperature distribution profile on the article surface along the rotation radius. The method provides a means for controlling the temperature of the article uniformly in a temperature range from about 30 DEG C and 1200 DEG C to allow different treatment applications to be performed on the article.
申请公布号 WO9745856(A1) 申请公布日期 1997.12.04
申请号 WO1997US09069 申请日期 1997.05.28
申请人 IPEC PRECISION, INC.;SINIAGUINE, OLEG;TOKMOULINE, ISKANDER 发明人 SINIAGUINE, OLEG;TOKMOULINE, ISKANDER
分类号 H01J37/32;C23C16/46;C23C16/50;C23C16/513;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32;H01L21/00 主分类号 H01J37/32
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