ROTARY TYPE SUBSTRATE TREATING DEVICE

摘要

PURPOSE: To make it possible to simplify constitution without generating the traces of chucking on the rear surface of a substrate and to avert the generation of stains of the rear surface of the substrate occurring in the constitution to vertically move the substrate for the purpose of carrying in and out of the substrate. CONSTITUTION: The outer peripheral edge of the substrate W is held by a substrate supporting member 10 which supports the substrate W by coming into point contact with the outer peripheral edge side of the rear surface of the substrate W and a regulating member 9 which regulates the position in the horizontal direction of the substrate W by coming into point contact with the outer peripheral end edge of the substrate W supported at the substrate supporting member 10, by which the substrate is made rotatable around the axial center of a perpendicular direction. The treating device is thus so constituted that the substrate is made rotatable around the axial center in the perpendicular direction. The substrate supporting member 10 itself is vertically moved to a treating position and a transferring and receiving position, by which the substrate is transferred to and received from a substrate transporting device.