Synthesis of metal oxide thin films

摘要

PCT No. PCT/US94/03865 Sec. 371 Date Oct. 5, 1994 Sec. 102(e) Date Oct. 5, 1994 PCT Filed Apr. 8, 1994 PCT Pub. No. WO94/23846 PCT Pub. Date Oct. 27, 1994Oxide thin films are deposited onto functionalized self-assembled monolayers (SAMs) which are bonded to various surfaces. The resulting oxide thin films have ordered, uniform densely packed crystalline structures.