| 摘要 |
PURPOSE: To obtain a coated hard alloy excellent in wear resistance by forming a coating film having higher hardness and toughness than (Ti, Al)N, (Ti, Al)C and (Ti, Al)CN. CONSTITUTION: A coating film of (Tia Alb Sic )Cx N1-x [where (a), (b), (c) and (x) show atomic ratio, 0.3<=a<=0.8, 0.2<=b<=0.7, 0.01<=c<=0.2 and 0<=x<=1] is formed by PVD or CVD in 0.5-10μm thickness on the surface of a hard alloy such as high-speed steel, cemented carbide or TiCN-based cermet. A coated hard member excellent in chipping resistance is obtd.
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