| 摘要 |
PURPOSE: To enhance polishing efficiency, and shorten polishing time by enabling continuous polishing by a limited quantity of abrasive. CONSTITUTION: A fixed tank 3 is housed in a rotary tank 2 forcedly rotated around the axis, and a core shaft 5 is housed in the fixed tank 3, and the axes of three members are aligned to each other. An annular space is respectively formed between the rotary tank 2 and the fixed tank 3 and between the fixed tank 3 and the core shaft 5. Partition plates 35 whose tips almost come into contact with an outer peripheral surface of the fixed tank 3 are protrusively arranged at intervals in the circumferential direction in an inside surface part of the rotary tank 2. A jig 25 to install a polishing object 31 is arranged in an inside annular space, and this jig is revolved around the core shaft. According to rotation of the rotary tank 2, an abrasive 50 in the inside annular space successively flows in housing chambers 36 between the partition plates 35 and 35 through a lower opening part 12, and is raised. The abrasive 50 flows in the annular space from an upper opening part 11 branches off left and right in the annular space, and falls in a fluid condition. At this falling time, the abrasive polishes the polishing object. |
