发明名称 Coating apparatus
摘要 A coating head includes slit wall members forming a slit therebetween. A surface of the wall members corresponding in position to an exit portion of the slit is finished so as to have a center line mean roughness not larger than 0.1 mu m.
申请公布号 US5545256(A) 申请公布日期 1996.08.13
申请号 US19940321313 申请日期 1994.10.11
申请人 KONICA CORPORATION 发明人 FUKUDA, KAZUHIRO;SAITO, ATSUSHI
分类号 B05C5/00;B05C5/02;B05C9/06;G03C1/74;(IPC1-7):B05C3/12 主分类号 B05C5/00
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