发明名称 |
Pressure sensor and chip therefor |
摘要 |
A pressure sensor is capable of detecting a certain pressure and an atmospheric pressure individually and independently in real time, with miniaturization and light weight. This is attained by providing a pressure sensor comprising a first pressure sensor; and an atmospheric pressure sensor. Each sensor includes a pressure-sensitive element and a circuit for amplifying an output signal from the pressure-sensitive element. The amplifying circuit for the first pressure sensor, and the pressure-sensitive element and the amplifying circuit for the atmospheric pressure sensor are provided on the same chip. The amplifying circuit compensates for nonuniformity in characteristics of the pressure-sensitive element due to temperatures.
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申请公布号 |
US5544529(A) |
申请公布日期 |
1996.08.13 |
申请号 |
US19940320741 |
申请日期 |
1994.10.11 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
MITANI, TATEKI;ICHIHASHI, MOTOMI;BESSHO, MIKIO |
分类号 |
G01L9/00;G01L9/06;G01L15/00;H01L29/84;(IPC1-7):G01L13/02 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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