发明名称 Pressure sensor and chip therefor
摘要 A pressure sensor is capable of detecting a certain pressure and an atmospheric pressure individually and independently in real time, with miniaturization and light weight. This is attained by providing a pressure sensor comprising a first pressure sensor; and an atmospheric pressure sensor. Each sensor includes a pressure-sensitive element and a circuit for amplifying an output signal from the pressure-sensitive element. The amplifying circuit for the first pressure sensor, and the pressure-sensitive element and the amplifying circuit for the atmospheric pressure sensor are provided on the same chip. The amplifying circuit compensates for nonuniformity in characteristics of the pressure-sensitive element due to temperatures.
申请公布号 US5544529(A) 申请公布日期 1996.08.13
申请号 US19940320741 申请日期 1994.10.11
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MITANI, TATEKI;ICHIHASHI, MOTOMI;BESSHO, MIKIO
分类号 G01L9/00;G01L9/06;G01L15/00;H01L29/84;(IPC1-7):G01L13/02 主分类号 G01L9/00
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