| 摘要 |
<p>PURPOSE: To obtain a transport container for semiconductor wafers, which facilitates taking in and out of the semiconductor wafers even though it contains many semiconductor wafers in a stack, and has an antistatic function. CONSTITUTION: A transport container A consists of a box-like container main body 1 with sidewalls along four sides and an upper lid 2 that can be swingably opened and closed and is provided along the upper edge of the sidewall, and the front sidewall 1b can be also swingably opened and closed. Semiconductor wafers 3 in a stack are placed in the container A and the tips of ribs 9 and 10, that come in contact with the semiconductor wafers 3, are covered with electroconductive membranes 15.</p> |
