| 摘要 |
PURPOSE: To prevent defective machining, in the case of incorrect measured data, by vertically moving a machining head based on a set value regardless of a measurement outputted from a distance sensor and thereby holding a focal position at an approximately desired position. CONSTITUTION: A laser beam 6 introduced to a machining head 11 is converged by a condensing device provided in the machining head 11, and emitted through a nozzle 11a to an object 9 to be machined. The measured data of a distance sensor 17 is processed by a processor 1 through a sensor I/F18 and converted into a focal position. In addition, it is compared with a focal position set as a machining condition; a biaxial servo motor 20 is rotatably controlled through a servo amplifier 19 so that the measured position may be made equal to the set position; and the machining head 11 is moved vertically. In the case of incorrect measured data, the machining head is vertically driven in accordance with the fluctuation of the set position regardless of the measured position. Since the state of incorrect measured data is short, the focal position for the object is held approximately at a desired position. |
