| 摘要 |
PURPOSE: To provide a nozzle which can stably form a ball while completely cutting off oxygen in the air, in a ball bonder. CONSTITUTION: When wire bonding is performed by using a metal wire like a copper wire and an aluminum wire, except a gold wire, inert gas is supplied to a wire ball forming part from a nozzle. As to the nozzle, the jetting port of the inert gas is formed as multistructure constituted of a nozzle 1 and a nozzle 2 which is arranged coaxially to the nozzle 1. |
