| 摘要 |
PURPOSE: To drive a bonding tool precisely at a high speed, by obtaining the driving speed of a swinging body or a tool, on the basis of an electromotive force generated from an electromotive force coil, and controlling a linear motor on the basis of the driving speed. CONSTITUTION: A direct acting element 16 is constituted of a collar 21 and a first coil 22 (coil for a motor) wound around the collar 21. A second coil 23 (an electromotive coil) is formed on the upper end portion of the collar 21, separately from the first coil 22. An electromotive force proportional to the speed of the direct acting element 16 can be obtained from the second coil 23. Since the revolution speed of a revolution shaft 11 can be detected in the non-contact manner, the moment of inertia of the revolution shaft 11 can be reduced, and the load applied to a swing driving mechanism 6 can be reduced. Thereby a bonding tool can be precisely driven and positioned at a high speed. |
