| 摘要 |
<p>PURPOSE: To improve a vertical stability of a supporting rod without lessening the number of semiconductor wafers to be stored, in a bottom supported wafer boat. CONSTITUTION: This equipment has, at least, wafer supporting rods 1 which have upper fitting sections 1d and lower fitting sections 1e, a top plate which has sections with which the upper fitting sections are to fit in, a bottom plate 3 which has sections with which the lower fitting sections are to fit in, and stoppers 4, 5 which maintain the fitting condition. Both ends of the wafer supporting rods are so formed that contact areas with the bottom plate and the top plate may be large. The stoppers consist of turning sections 4b, 5b and arms 4a, 5a. Both the top plate and the bottom plate have holes for fitting the turning sections in and the wafer supporting rods have arm fitting recesses 1K. With the rotation of the stoppers, the arms are fit in with the fitting recesses and thereby the fitting condition can be maintained. The top plate is smaller than the bottom plate.</p> |
