| 摘要 |
<p>PURPOSE: To eliminate the need of modifying a transfer stage regardless of the type or the outer dimensions of a device by sucking an objective device, sucked through a vacuum suction arm, continuously during transfer of the transfer stage. CONSTITUTION: An objective device 1 is lowered, while being sucked to a vacuum suction arm 3, toward a transfer stage 6 having a pocket 7 of such size as not touching a lead terminal 2. The device 1 is then vacuum sucked, at the bottom face, to the nozzle 4 of the state 6. Subsequently, suction of the device 1 through the arm 3 is interrupted and the arm 3 is separated from the device 1 and elevated. Finally, the device 1 is transferred while being vacuum sucked to the nozzle 4. This structure eliminate the need to prepare a stage for every type of device 1 having different shape or dimensions.</p> |
