| 摘要 |
PURPOSE: To easily adjust the incident angle on an objective lens with high accuracy even if a short-wavelength light source, such as UV light, is used as master ring light by providing a master ring light adjusting mens for changing the incident angle of the master ring light on this objective lens. CONSTITUTION: The master ring light source (Ar laser oscillation tube) 10 emits UV light 11 of a wavelength λ=363.8nm. An auto-laser controller 20 stabilizes the master ring light 11 emitted from the master ring light source 10 and removes its noise. An E/O modulator 30 modulates the master ring light 11 from the auto-laser controller 20 to a prescribed pulse length. An optical head 40 contains a mirror 41 for correction, a drop-in mirror 42, the objective lens 43, a polarization beam splitter 44 and a dichroic mirror 45. This optical head 40 converges the master ring light 11 from the E/O modulator 30 and the laser beam 1a for adjustment from a laser beam source 1 for adjustment onto a photoresist 11 (onto the master disk 110) applied on a glass disk 111 by the objective lens 43. The exposure recording of master disk data is executed by the master ring light 11 of these laser beams 1a, 11. |
