PROBE FOR INSPECTING IC OR THE LIKE, ITS MANUFACTURE, AND INSPECTION METHOD

摘要

PURPOSE: To allow a force of contact to be uniformly applied to a metal contact without causing damage to the terminals of a subject for inspection and to prevent damage resulting from contact by providing the leg of the contact integral with the inside of a cylinder made from a polymer provided on the wires of a substrate, and providing the head of the contact integral with the upper end face of the cylinder. CONSTITUTION: A number of columnar cylinders 12 each of which is 30μm in bore, 60μm in outside diameter and 25μm high and made from a polyimide polymer are provided in the required pattern on the Al wires 11 of a substrate 10 made from polyimide that is 0.3mm thick and 10mm by 10mm. The leg 13a of a rivet-shaped contact 13 made of Au is provided integral with the inside of each cylinder 12. The Au contact 13 has a head 13b provided integral with the upper end face of each cylinder 12 to form a composite contact 14, the head 13b being 35μm high and 50μm in outside diameter. The top surface of the head of the Au contact 13 of the contact 14 is spherical.