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发明名称
CONTAINER FOR SEMICONDUCTOR WAFER SAMPLE AND METHOD OF PREPARING SAMPLE
摘要
申请公布号
KR0166369(B1)
申请公布日期
1999.02.01
申请号
KR19910071304
申请日期
1991.10.11
申请人
KAKIZAKI MFG. CO.,LTD;PUREX CO., LTD.
发明人
MURAOKA, HISASHI;KAKIZAKI, TAKEYOSHI
分类号
G01N1/28;H01L21/304;H01L21/66;H01L21/673;(IPC1-7):H01L21/68
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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