| 摘要 |
<p>PURPOSE: To reduce contamination for a semiconductor wafer in an airtight container by always flowing an economicaly constant amount of substitution gas. CONSTITUTION: This gas supply system of a carriage airtight container is provided with an airtight container 10 which receives a semiconductor wafer W, of which the inside is airtightly closed with inactive gas atmosphere; inactive gas inside the airtight container 10; and a gas supplier 5 for supplying/ discharging. In the airtight container 10, there are provided one-way valves 30, 31 that allow the inactive gas to flow in the direction reverse to each other in a plurality of gas paths 20, 21 connecting this inside with the outside. Further, in the gas supplier, gas paths 50, 51 attachably or detachably corresponding to the respective gas paths 20, 21 are formed.</p> |
