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发明名称
PROBE CARD
摘要
申请公布号
JPH08201429(A)
申请公布日期
1996.08.09
申请号
JP19950008657
申请日期
1995.01.24
申请人
NEC KANSAI LTD
发明人
YAMAGUCHI HIDENOBU
分类号
G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
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代理人
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