| 摘要 |
PURPOSE: To obtain a small-sized angular speed sensor in which the assembling/ connecting process is simplified significantly. CONSTITUTION: Intermediate holding plates 5, 8, applied with drive input electrodes 51, 52 (not shown) and detection output electrodes 81, 82 (not shown), are disposed in the extending direction of the oscillatory branches 3, 4, 6, 7 at a drive side oscillatory part and a detection side oscillatory part. The intermediate holding branches 5, 8 are mounted, through spacer members 30, 40, on a substrate on which predetermined wiring conductors 12-15 are formed. |
