摘要 |
<p>PURPOSE: To equalize the element operation of a arrayed field emission type cold cathode, and suppress the temporal fluctuation of the quantity of emitted electrons. CONSTITUTION: This is a field emission type of cold cathode which has an insulating layer 4 and a gate electrode 5 on an conductive substrate 1 and has a conical emitter cone within the cavity 6 piercing the insulating layer 4 and the gate electrode 5. This has a plurality of insulating layers 2 cut into pieces on the conductive substrate 1 and further has a plurality of conductive layers 3 connected electrically to the substrate 1 and the emitter cone 7 on the second insulating layer 2. Moreover, the conductive layer 3 has a region low in electric resistance in the region in contact with the emitter cone 7.</p> |