| 摘要 |
<p>PURPOSE: To provide a fixing device of a sample holder wherein a holding position to a sample holder does not deviate even when a sample holder is moved, a supporting point of a sample holder can be fixed without being limited to a periphery and simplification of a constitution, weight reduction and cost reduction are realized. CONSTITUTION: A device for fixing a sampler holder 12 for holding a sample 16 on a reference table 10 fixed to a movement stage 4 is constituted of a member whose rigidity is small in a direction getting near and away from the reference table 10 and has a plurality of supporting arms 52 whose one end is fixed to the sample holder 12 and an electrostatic chuck 58 which is provided to a free end side of the supporting arms 52 and fixes the supporting arm 52 to the reference table 10 when the sample holder 12 is in a specified position of the reference table 10.</p> |
