发明名称 MANUFACTURE OF FIELD-EMISSION DISPLAY DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To prevent leakage current due to contamination during manufacturing processes, without using a metal layer as a separation layer and without the trouble of using other vapor deposition method. SOLUTION: A method for manufacturing field emission display device includes a step for forming a strip of cathode 12 on a substrate, a step for forming an insulating layer 13 on the substrate on which the strip of cathode has been formed, and a step for forming a gate electrode 14 in the form of a strip in the direction crossing the cathode by vapor depositing the gate electrode 14 on the insulating layer and corroding it in a predetermined pattern. The method further includes a step for forming a polyimide layer 15 on the insulating layer on which the gate electrode has been formed, a step for forming a metal layer 16 by vapor depositing a metal on the polyimide layer 15, a step for corroding the metal layer in order to form an opening of a predetermined diameter, and a step for corroding the polyimide layer in order to form a hole aligned with the opening formed during the metal-layer corroding step.</p>
申请公布号 JPH08203424(A) 申请公布日期 1996.08.09
申请号 JP19950184373 申请日期 1995.07.20
申请人 SANSEI DENKAN KK 发明人 KIN SHIYOUMIN;BOKU DANSHIN
分类号 H01J17/48;H01J9/02;(IPC1-7):H01J9/02;H01J31/12;H01J31/15 主分类号 H01J17/48
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