摘要 |
<p>PROBLEM TO BE SOLVED: To prevent leakage current due to contamination during manufacturing processes, without using a metal layer as a separation layer and without the trouble of using other vapor deposition method. SOLUTION: A method for manufacturing field emission display device includes a step for forming a strip of cathode 12 on a substrate, a step for forming an insulating layer 13 on the substrate on which the strip of cathode has been formed, and a step for forming a gate electrode 14 in the form of a strip in the direction crossing the cathode by vapor depositing the gate electrode 14 on the insulating layer and corroding it in a predetermined pattern. The method further includes a step for forming a polyimide layer 15 on the insulating layer on which the gate electrode has been formed, a step for forming a metal layer 16 by vapor depositing a metal on the polyimide layer 15, a step for corroding the metal layer in order to form an opening of a predetermined diameter, and a step for corroding the polyimide layer in order to form a hole aligned with the opening formed during the metal-layer corroding step.</p> |