发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PURPOSE: To enable the leveling processing to be easily performed by precisely and efficiently understanding the characteristics of bumps deformed by the leveling process. CONSTITUTION: A semiconductor chip 2 made of plural bumps 1 arranged on the surface thereof is held by a semiconductor holder 5 from the rear side so that the levels of the bumps 1 may be made even simultaneously to perform the electrical connection test of the bumps 1. In such a constitution, at least either the semiconductor holder 5 or a leveling stage 6 may be heated.
申请公布号 JPH08203902(A) 申请公布日期 1996.08.09
申请号 JP19950007523 申请日期 1995.01.20
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAGI TAKAHIKO;AZUMA KAZUJI;TSUKAHARA NORITO
分类号 H01L21/60;H01L21/321;(IPC1-7):H01L21/321 主分类号 H01L21/60
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