| 摘要 |
PURPOSE: To improve the stability at the time of electric discharge and to prolong the life of a device by providing this device with a discharge pipe consisting of a first member which has a diameter larger than the diameter of the plural discharge ports disposed on a second substrate and is in contact with a second cylindrical member, thereby increasing conductance, shortening the discharge time and increasing a vacuum degree. CONSTITUTION: The substrate glass 11 is provided with the plural discharge ports 17. Connecting plate glass 1 connecting the substrate glass 11 and the discharge pipe 18 are held between the substrate glass 11 and the discharge pipe 18. The vacuum evacuation to the discharge pipe 18 from the discharge ports 17 of the substrate glass 11 is executed via holes 1a, 1b formed at this connecting plate glass 1. The surface of the connecting plate glass 1 in contact with the substrate 11 is provided with the hole 1a and the surface in contact with the discharge pipe 18 is provided with the hole 1b. The diameter of the hole 1a is larger than the diameter of the hole 1b. The diameter of the hole 1a is larger than the diameter of the plural discharge holes 17 and includes all the diameters of the plural discharge ports 17. The hole 1b is formed smaller than the bore of the discharge pipe 18. |
