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发明名称
摘要
申请公布号	JP2864058(B2)	申请公布日期	1999.03.03
申请号	JP19910151130	申请日期	1991.05.27
申请人	MITSUBISHI MATERIARU KUOOTSU KK	发明人	TAKESHITA SHIN
分类号	C30B15/10;H01L21/208;(IPC1-7):C30B15/10	主分类号	C30B15/10
代理机构		代理人
主权项
地址

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