| 摘要 |
PURPOSE: To obtain an oscillatory gyroscope employing a piezoelectric material in which the electrode can be formed accurately while reducing the overall thickness. CONSTITUTION: First and second electrodes 13a, 13b are formed on one side of an elastic body 12 made of a single crystal piezoelectric material and a counter electrode 14 is formed on the other side thereof. When the electrodes 13a, 13b are applied with AC power in reverse phase, a bending oscillation is generated in the elastic body 12 (12a, 12b) in the X-direction. In the system rotating about Z-axis, the elastic body 12 (12a, 12b) is oscillated in the Y- direction by Coriolis force to induce power in the electrodes 13a, 13b. An adder 17 adds the powers detected by both electrodes 13a, 13b to offset the driving power thus taking out only the oscillation component caused by Coriolis force. Since the first and second electrodes 13a, 13b are formed on the same side, the relative position thereof can be set accurately by etching or the like. |
