| 摘要 |
PURPOSE: To carry out a scanning probe microscope to scan an object in an arbitrary direction along a locus which is close to an ideal straight line with high resolution by providing a fine adjusting means, its driving means, digital arithmetic processing section, etc., to the microscope. CONSTITUTION: A probe displacement detecting section 8 detects the displacement of a cantilever 9 by using an optical lever method and outputs a signal Sig1 to a Z-control section 3 and the section 3 controls the feed back of the signal Sig1 so as to maintain the displacement of the cantilever 9 at a fixed value and outputs a Sig2 for elongating/contracting a cylindrical piezoelectric body 12 in Z-direction and the ruggedness information of the surface of a sample to a microcomputer 2. The ruggedness information is stored in a host computer 1 for forming a picture. An X- and Y-direction scanning control section 4 constitutes a digital arithmetic processing section which outputs a pulse signal Sig5 for sampling X- and Y-scanning data D1 and D2 and the ruggedness information upon receiving an instruction from the host computer 1 through the microcomputer 2. An X-scanning D/A converter 5 and Y- scanning D/A converter 6 respectively convert the data D1 and D2 outputted from the control section 4 and output X- and Y-scanning signals Sig4 and 5 to the piezoelectric body 12.
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