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发明名称
PIEZOELECTRIC DRIVING DEVICE FOR DRIVING PROBE OF SCANNING PROBE TYPE MICROSCOPE
摘要
申请公布号
JPH08201401(A)
申请公布日期
1996.08.09
申请号
JP19950012243
申请日期
1995.01.30
申请人
NIKON CORP
发明人
NAKANO KATSUSHI
分类号
G01B21/30;G01N37/00;G01Q10/04;G01Q90/00;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
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地址
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