| 摘要 |
PURPOSE: To accurately and easily measure the shape of an object which moves speedily. CONSTITUTION: The image of the edge of an object 1 to be measured which is illuminated by a back light 2 is formed by a one-dimensional CCD 6 by an image pick-up lens system 5 through a rotary mirror 3, the fed of the object 1 to be measured is used as a time axis, and an outer shape is used as a space distribution, thus obtaining the two-dimensional distribution of the outer shape, where the feed of the object 1 to be measured and the rotary angle of the rotary mirror 3 are slightly shifted and synchronized, thus reducing the image flow due to a high-speed movement of the object 1 to be measured and measuring a shape with a high resolution. |
