MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19950009842-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH08203847(A)	申请公布日期	1996.08.09
申请号	JP19950009842	申请日期	1995.01.25
申请人	NEC CORP	发明人	SHISHIGUCHI SEIICHI
分类号	C23C16/24;H01L21/205;H01L21/28;H01L21/285;(IPC1-7):H01L21/285	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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