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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH08203877(A)
申请公布日期
1996.08.09
申请号
JP19950011475
申请日期
1995.01.27
申请人
OKI ELECTRIC IND CO LTD
发明人
ITO TOSHIO
分类号
C09D185/00;H01L21/027;H01L21/302;H01L21/3065;H01L21/312;(IPC1-7):H01L21/306
主分类号
C09D185/00
代理机构
代理人
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地址
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