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发明名称
WIRING FORMATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08204013(A)
申请公布日期
1996.08.09
申请号
JP19950231356
申请日期
1995.09.08
申请人
L JII SEMIKON CO LTD
发明人
YANGUUKUUON JIYUN
分类号
H01L21/3205;H01L21/203;H01L21/265;H01L21/28;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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