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发明名称
System und Verfahren zur Ermittlung des Zentrums eines integrierten Schaltungsplättchens
摘要
申请公布号
DE3855389(D1)
申请公布日期
1996.08.08
申请号
DE19883855389
申请日期
1988.04.18
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
CHENG, DAVID, SAN JOSE CALIFORNIA 95218, US;ZHANG, WESLEY W., BURLINGAMA CALIFORNIA 94010, US
分类号
B65G43/08;G01B11/00;G01N21/84;G05D3/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/00
主分类号
B65G43/08
代理机构
代理人
主权项
地址
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