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发明名称
Flüssigkeitsverdampfungsventil
摘要
申请公布号
DE69208306(T2)
申请公布日期
1996.08.08
申请号
DE19926008306T
申请日期
1992.09.18
申请人
APPLIED MATERIALS JAPAN, INC., TOKIO/TOKYO, JP
发明人
NISHIZATO, HIROSHI, 14-3, SHINIZUMI, NARITA-SHI, CHIBA, JP;IIZUKA, HIROSHI, 14-3 SHINIZUMI, NARITA-SHI, CHIBA, JP;SUZUKI, HIROMI, 14-3 SHINIZUMI, NARITA-SHI, CHIBA, JP
分类号
F16K11/00;B01F3/02;B01J4/00;C23C16/448;H01L21/223;H01L21/31;H01L49/02;(IPC1-7):C23C16/44;B01J3/02
主分类号
F16K11/00
代理机构
代理人
主权项
地址
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