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发明名称
Druckbeständige thermische Reaktoranlage für Bearbeitungen von Halbleiterbauteilen
摘要
申请公布号
DE69025972(T2)
申请公布日期
1996.08.08
申请号
DE19906025972T
申请日期
1990.01.16
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
ADAMS, DAVID VINCENT, SAN JOSE, CA 95129, US;ANDERSON, ROGER NORMAN, SANTA CLARA, CA 95051, US;DEACON, THOMAS EUGENE, SAN JOSE, CA 95120, US
分类号
F27B17/00;C23C16/44;C23C16/48;H01L21/205;H01L21/22;H01L21/31;H01L21/324;(IPC1-7):C23C16/44;C23C16/46;H01L21/00
主分类号
F27B17/00
代理机构
代理人
主权项
地址
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