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发明名称
CONTINUOUS, REAL TIME MICROWAVE PLASMA ELEMENT SENSOR
摘要
申请公布号
EP0724720(A1)
申请公布日期
1996.08.07
申请号
EP19940932014
申请日期
1994.10.24
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;BATTELLE MEMORIAL INSTITUTE;ELECTO - PYROLYSIS, INC.
发明人
WOSKOV, PAUL, P.;SMATLAK, DONNA, L.;COHN, DANIEL, R.;WITTLE, J. KENNETH;TITUS, CHARLES, H.;SURMA, JEFFREY E.
分类号
G01N21/68;G01N21/73;(IPC1-7):G01N21/73
主分类号
G01N21/68
代理机构
代理人
主权项
地址
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