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发明名称
Arc control and switching element protection for pulsed DC power supply
摘要
申请公布号
GB9611416(D0)
申请公布日期
1996.08.07
申请号
GB19960011416
申请日期
1996.05.31
申请人
ENI
发明人
SELLERS JEFF C
分类号
C23C14/34;C23C14/38;C23C14/54;H01F41/18;H01J37/34;H01L21/203
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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