发明名称 WASHER USING SUPERCRITICAL FLUID
摘要 <p>PURPOSE: To provide a washer by which the washing of a material to be washed and the pressure rise of a washing medium used in the next washing are performed at the same time. CONSTITUTION: A buffer tank 7 connected to a booster pump P1 by piping is installed. The booster pump P1 raises the pressure of carbon dioxide used in the next washing to temporarily store it in a buffer tank 7 during washing the material to be washed 6. After washing treatment of the material to be washed 6 is finished, carbon dioxide is delivered to the washing chamber 1 from the buffer tank 7. In this way, time required for washing treatment is shortened.</p>
申请公布号 JPH08197021(A) 申请公布日期 1996.08.06
申请号 JP19950009442 申请日期 1995.01.25
申请人 SHARP CORP 发明人 MINAMIHOUNOKI TAKASHI
分类号 B08B5/00;B01J3/00;B08B3/10;B08B7/00;H01L21/304;(IPC1-7):B08B3/10 主分类号 B08B5/00
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