| 摘要 |
PURPOSE: Air quantity sensor using a minute heating unit forms a temperature sensor to right and left sides of the heating unit, senses a resistance variation of right and left sides according to air flow and air quantity, calculates the sensed resistance variation as a temperature, and detects air quantity. CONSTITUTION: Air quantity sensor using a minute heating unit(16) includes a nitride layer(20,24), a first metal layer, double metal layer, and electrode part. The nitride layer is formed by low pressure chemical vapor deposition method at a predetermined temperature on a silicon wafer(10). The first metal layer is formed as a first predetermined thickness on the silicon wafer. The second metal layer is formed as a second predetermined thickness on the silicon wafer. The second predetermined thickness is thicker than the first predetermined thickness. The double metal layer is made of the second metal layer. The nitride layer formed by a sputtering method on the patterned double metal layer and some part of the nitride layer are selectively etched, thereby making a contact hole. The electrode part is formed in the contact hole. Thereby, air quantity sensor forms a temperature sensor to right and left sides of the heating unit, senses a resistance variation of right and left sides according to air flow and air quantity, calculates the sensed resistance variation as a temperature, and detects air quantity.
|
