GAS PIPING FOR MANUFACTURING SEMICONDUCTOR,申请号JP19950026041-传众专利搜索

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发明名称	GAS PIPING FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号	JPH08200600(A)	申请公布日期	1996.08.06
申请号	JP19950026041	申请日期	1995.01.20
申请人	NIPPON STEEL CORP	发明人	OKETA YUKIHIRO
分类号	F16L55/00;C23C16/44;C23C16/455;F17D5/00;H01L21/205;(IPC1-7):F17D5/00	主分类号	F16L55/00
代理机构		代理人
主权项
地址

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