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发明名称
Laser oscillating apparatus
摘要
申请公布号
EP1032097(A3)
申请公布日期
2001.09.12
申请号
EP20000301496
申请日期
2000.02.25
申请人
OHMI, TADAHIRO;CANON KABUSHIKI KAISHA
发明人
OHMI, TADAHIRO;SUZUKI, NOBUMASA;SHINOHARA, TOSHIKUNI;OHSAWA, HIROSHI;HIRAYAMA, MASAKI;TANAKA, NOBUYOSHI
分类号
H01L21/027;G03F7/20;H01S3/03;H01S3/0973;H01S3/0975;H01S3/225;(IPC1-7):H01S3/097
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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