发明名称 |
Amorphes Fluorpolymer enthaltende Filmabdeckung |
摘要 |
<p>A pellicle comprising a thin, durable film of substantially uniform thickness which absorbs less than 10% light at wavelengths between 190 and 820 nanometers, tautly adhered to one edge of an enclosed support frame, said thin film comprising amorphous fluoropolymers having a refractive index between 1.24 and 1.41. Pellicles of this type are dust defocusing covers for photomasks and reticles used to project patterns onto light sensitive substrates such as photoresist-coated semiconductor wafers which are used in the manufacture of integrated circuits.</p> |
申请公布号 |
DE69025245(T2) |
申请公布日期 |
1996.08.01 |
申请号 |
DE1990625245T |
申请日期 |
1990.09.04 |
申请人 |
E.I. DU PONT DE NEMOURS & CO., WILMINGTON, DEL., US |
发明人 |
KEYS, DALEN E., TOWANDA, PENNSYLVANIA 18848, US |
分类号 |
C08J5/18;G03F1/62;(IPC1-7):G03F1/14 |
主分类号 |
C08J5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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